Application Case of Atonm Readhead M10 Series in Magnetic Levitation Multi-Mover Vacuum Conveyor Line

I. Project Background

In the scenarios of high-end chip manufacturing and precision medical component handling, there are stringent requirements for the cleanliness of the transportation environment and the accuracy of motion control. Traditional transmission mechanisms (chains, belts, gears, etc.) are prone to generate dust during operation, which may contaminate chips or medical components, and are also difficult to meet the demand for micron-level motion control. The magnetic levitation multi-mover vacuum conveyor line, featuring contactless transmission and low pollution, has become an ideal solution, and high-precision position detection is the key to its stable operation.

II. Application Solution

(I) Equipment Composition

The magnetic levitation multi-mover vacuum conveyor line consists of a magnetic levitation track, multi-mover carrying platforms (as shown in the figure, multiple carrying platforms are arranged in parallel), a control system, and the core position detection component—the Atonm Readhead MH0 Series. Each mover is configured with a dedicated readhead to realize independent collection of position signals.

(II) Function Realization of the Readhead

The Atonm Readhead MH0 Series is installed on the side of each multi-mover. Based on the principle of electromagnetic induction, it captures the real-time position information of the movers on the vacuum conveyor line. Its anti-interference circuit design is adapted to the electromagnetic environment in vacuum conditions, stably outputting high-precision position signals and transmitting them to the control system, which provides data support for the start-stop control, speed regulation and precise positioning of the movers.

III. Application Advantages

(I) Clean Environment Guarantee

The magnetic levitation system eliminates traditional mechanical transmission components, fundamentally avoiding dust generation. The Atonm Readhead MH0 Series adopts a sealed design that does not introduce additional contamination. Together, they create a vacuum and dust-free transportation environment for high-end chips and medical components, reducing the risk of product scrappage caused by contamination.

(II) High-Precision Motion Control

The MH0 Series readheads feature high resolution with a position detection accuracy reaching the micron level. Cooperating with the magnetic levitation multi-mover system, they realize precise displacement control of the movers on the vacuum conveyor line. In processes such as chip wafer handling and precision transmission of medical reagents, they ensure minimal errors in component placement and transfer, improving production yield and the assembly accuracy of medical equipment.

(III) System Compatibility and Stability

With a compact structure, the readheads are suitable for the narrow installation space of the magnetic levitation multi-mover conveyor line. Their environmental resistance (tolerance to vacuum, temperature fluctuations, etc.) ensures long-term stable operation. Coordinated with the magnetic levitation system, they support parallel and independent operation of multiple movers, improving the overall efficiency of the conveyor line and meeting the continuous production requirements of high-end manufacturing and medical scenarios.

IV. Application Effects

In the high-end chip manufacturing process, the conveyor line combined with Atonm readheads achieves a handling accuracy of ±2μm for chip intermediates and reduces the chip defect rate caused by dust contamination. In medical handling scenarios, the transportation error of reagents and precision components is controlled within ±1μm. These results verify the application value of the Atonm Readhead MH0 Series in magnetic levitation multi-mover vacuum conveyor lines, providing a reliable technical solution for precision handling in high-end manufacturing and medical fields.